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LW400LJT/LW400LMDT Large Platform Infinite Distance Chip Inspection Metallographic Microscope
The large platform infinite distance chip inspection microscope is suitable for industries such as semiconductor wafer inspection, chip packaging, circuit substrates, and materials. It can be used for polarization and conversion between bright and dark field observations. Specially designed large moving range stage, with a moving range of 8 "× 8" (204mm × 204mm), to meet the needs of the semiconductor industry. Coarse micro motion coaxial focusing mechanism, adjustable coarse motion elasticity, with limit locking device, micro motion grid value: 0.7 μ m. Three lens barrel, capable of 100% transparent photography.
Standard configuration
technical specifications | |||
eyepiece |
Large field of view WF10X (field of view size Φ 22mm) |
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Infinite long distance flat field achromatic objective lens |
LW400LJT |
PL L5X/0.12 working distance: 26.1 mm |
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PL L10X/0.25 working distance: 20.2 mm | |||
PL L20X/0.40 working distance: 8.80 mm | |||
PL L50X/0.70 working distance: 3.68 mm | |||
PL L80X/0.80 working distance: 1.25 mm | |||
LW400LMDT |
PL L5X/0.12 BD working distance: 9.70 mm |
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PL L10X/0.25 BD working distance: 9.30 mm | |||
PL L20X/0.40 BD working distance: 7.23mm | |||
PL L50X/0.70 BD working distance: 2.50 mm | |||
PL L80X/0.80 BD working distance: 1.25 mm | |||
eyepiece tube |
Triple eyepiece tilted at 30 degrees, capable of 100% light transmission photography |
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Falling light illumination system |
LW400LJT |
6V30W halogen lamp, adjustable brightness |
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LW400LMDT |
12V50W halogen lamp, adjustable brightness |
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Built in field of view light bar, aperture light bar, (yellow, blue, green, frosted glass) color filter conversion device, push-pull analyzer and polarizer | |||
Focuser |
Coarse micro coaxial focusing with locking and limiting devices, micro grid value: 0.7 μ m |
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converter |
Five holes (inward ball positioning) |
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stage |
Mechanical stage, external dimensions: 280mmX270mm, movement range: horizontal (X) 204mm, vertical (Y) 204mm |
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